Yttria Stabilized Zirconia Sputtering Target

Yttria Stabilized Zirconia Sputtering Target

Yttria Stabilized Zirconia Sputtering Target

  • Custom sizes and standard sizes in stock
  • Quick Lead Time
  • Competitive Price
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Yttria Stabilized Zirconia Sputtering Target is a durable ceramic material designed for precise thin film deposition. With strong resistance to heat and corrosion, it ensures stable performance in harsh environments. Commonly used in solid oxide fuel cells, optical devices, and electronic coatings, it provides consistent film quality and high purity for demanding applications. We can supply high-quality yttria stabilized zirconia sputtering targets with various specifications and competitive prices, offering customized solutions to meet specific requirements.

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Or email us at sales@heegermaterials.com.

Yttria Stabilized Zirconia Sputtering Target Data Sheet

Color:White
Molecular Formula:Y2O3/ZrO2
Density:5.85-6.10 g/cm3
Purity:99.9%, 99.95%, 99.99%, 99.995%, 99.999%
Melting Point:2600°C

Yttria Stabilized Zirconia Sputtering Target Description

Yttrium-stabilized Zirconia (YSZ) Sputtering Target is a high-performance ceramic material used in thin film deposition. It consists of zirconium dioxide (ZrO2) stabilized with yttrium oxide (Y2O3), ensuring a stable cubic phase at room temperature. YSZ offers excellent ionic conductivity, thermal stability, and chemical resistance, making it a key material in solid oxide fuel cells, electrolyte membranes, oxygen sensors, and advanced protective coatings. Its uniform composition and high purity ensure reliable deposition results. In addition to sputtering targets, we also provide YSZ Crystal Substrate for various high-tech applications. Heeger Materials provides high-quality YSZ sputtering targets to meet diverse application requirements.

  • Yttria Stabilized Zirconia Sputtering Target

Yttria Stabilized Zirconia Sputtering Target Specifications

Purity99.9%, 99.95%, 99.99%, 99.995%, 99.999%
ShapeDiscs, Plates, Column Targets, Step Targets, Custom-made
Molecular Weight347.69
AppearanceWhite Target
Melting Point>2600°C
Available SizesDiameter: 1.0″, 2.0″, 3.0″, 4.0″, 5.0″, 6.0″
Thickness: 0.125″, 0.250″

Yttria Stabilized Zirconia Sputtering Target Features

  • High Ionic Conductivity: Enables efficient charge transfer in fuel cells and electrochemical devices.
  • Excellent Thermal Stability: Maintains structural integrity under high sputtering temperatures.
  • Chemically Inert: Resists corrosion in reactive or oxidative environments during deposition.
  • Dense and Uniform Microstructure: Promotes consistent sputtering rates and smooth thin films.
  • Stable Cubic Phase: Yttria stabilization ensures phase stability across a wide temperature range.

Yttria Stabilized Zirconia Sputtering Target Applications

  • Solid Oxide Fuel Cells (SOFCs): Used to deposit thin electrolyte or interlayer coatings.
  • Oxygen Sensors: Applied in gas sensor films due to their oxygen ion conductivity.
  • Optical Coatings: Suitable for reflective and anti-reflective layers in high-temperature optics.
  • Semiconductor Devices: Provides insulation or buffer layers in microelectronic applications.
  • Protective Coatings: Ideal for wear-resistant, chemically stable films on metal or ceramic parts.
High-Temperature Sensors
High-Temperature Sensors
Solid Oxide Fuel Cells (SOFCs)
Solid Oxide Fuel Cells (SOFCs)
Semiconductor Processing
Semiconductor Processing
Optical Coatings
Optical Coatings

Yttria Stabilized Zirconia Ceramic Properties

PropertyTypical Value
Density5.85-6.10 g/cm³
Hardness~12–13 GPa (Vickers)
Flexural Strength~900–1200 MPa
Compressive Strength>2000 MPa
Fracture Toughness~8–10 MPa·m¹/²
Elastic Modulus~200–210 GPa
Poisson’s Ratio~0.3

PropertyTypical Value
Thermal Conductivity (25 °C)~2–3 W/m·K
Coefficient of Thermal Expansion~10.5 × 10⁻⁶ /°C (room temp – 1000 °C)
Maximum Operating Temperature~1000–1200 °C (in oxidizing atmosphere)
Thermal Shock ResistanceModerate to High

PropertyTypical Value
Ionic Conductivity (1000 °C)~0.1 S/cm (O²⁻ ion conductor)
Electrical Resistivity (room temp)>10¹² Ω·cm
Dielectric Constant~25–30 (at 1 MHz)
Dielectric Strength~15–20 kV/mm

Yttria Stabilized Zirconia Ceramic Material Machining

Macor Machinable Glass Ceramic Material Machining

Yttria Stabilized Zirconia (YSZ) is a high-performance ceramic material known for its exceptional fracture toughness, high strength, and ionic conductivity. These characteristics make it ideal for demanding environments, though its machining requires specialized approaches due to its hardness and brittleness. Key machining aspects include:

  • Cutting: Diamond-coated tools or precision laser cutting are employed to maintain edge integrity and minimize microcracking.
  • Grinding: Fine-grit diamond grinding is used to achieve tight tolerances and smooth surfaces, especially for components with complex geometries.
  • Drilling: Ultrasonic machining or precision diamond drilling enables accurate formation of micro-features for sensor and fuel cell applications.
  • Surface Finishing: Polishing enhances wear resistance, biocompatibility, and thermal stability, making it suitable for advanced engineering uses.

Yttria Stabilized Zirconia Ceramic Packaging

Yttria stabilized zirconia ceramic products are typically packaged in vacuum-sealed bags to prevent moisture or contamination and wrapped with foam to cushion vibrations and impacts during transport, ensuring the quality of products in their original condition.

ceramic products packing-HM

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We will check and get back to you in 24 hours.

To customize your yttria stabilized zirconia sputtering target, please provide the following details:

  1. Dimensions: Length, Width, Diameter, Thickness, etc.
  2. Shape: Rectangular, round, or tube.
  3. Tolerances: Specify the required tolerances.
  4. Purity of the sputtering target
  5. Application: Indicate the intended application or industry.
  6. Backing Plate: If bonding service is required, please specify the material and dimensions of the backing plate.
  7. Quantity of the products you need
  8. Alternatively, you can provide a drawing with your specifications.

Once we have these details, we can provide you with a quote within 24 hours.

We carry a wide variety of yttria stabilized zirconia ceramic products in stock, and for these, there is generally no minimum order requirement. However, for custom orders, we typically set a minimum order value of $200. The lead time for stock items is usually 1-2 weeks, while custom orders usually take 3-4 weeks, depending on the specifics of the order.

 Yes, the yttria stabilized zirconia sputtering target is designed to maintain phase stability and mechanical strength even under prolonged high-temperature sputtering, which is crucial for advanced thermal barrier and fuel cell applications.

High-purity yttria stabilized zirconia sputtering targets (≥99.9%) help produce films with minimal defects and stable electrical or optical properties, which is essential for applications like sensors and microelectronics.


Advanced Ceramic Hub, established in 2016 in Colorado, USA, is a specialized supplier and manufacturer of yttria stabilized zirconia ceramic products. With extensive expertise in supply and export, we offer competitive pricing and customized solutions tailored to specific requirements, ensuring outstanding quality and customer satisfaction. As a professional provider of ceramics, refractory metals, specialty alloys, spherical powders, and various advanced materials, we serve the research, development, and large-scale industrial production needs of the scientific and industrial sectors.

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